{"id":30841,"date":"2026-11-11T11:58:46","date_gmt":"2026-11-11T03:58:46","guid":{"rendered":"https:\/\/www.ixpower.cn\/?p=30841"},"modified":"2026-11-11T11:58:46","modified_gmt":"2026-11-11T03:58:46","slug":"%e5%be%ae%e7%94%b5%e5%ad%90%e5%88%b6%e9%80%a0%e4%b8%8e%e5%85%89%e5%88%bb%e6%8a%80%e6%9c%af%e4%bb%8b%e7%bb%8d","status":"publish","type":"post","link":"https:\/\/www.ixpower.cn\/index.php\/2026\/11\/11\/30841\/","title":{"rendered":"\u5fae\u7535\u5b50\u5236\u9020\u4e0e\u5149\u523b\u6280\u672f\u4ecb\u7ecd"},"content":{"rendered":"<p data-first-child=\"\" data-pid=\"bwyTJWWO\">\u5fae\u7535\u5b50\u5236\u9020\u548c\u7ec4\u4ef6\u7ec4\u88c5\u662f\u4efb\u4f55\u5c04\u9891\u4ea7\u54c1\u751f\u4ea7\u94fe\u7684\u5173\u952e\u6b65\u9aa4\uff0c\u56e0\u4e3a\u5b83\u51b3\u5b9a\u4e86\u4ea7\u54c1\u7684\u4e0a\u5e02\u65f6\u95f4\u4ee5\u53ca\u53ef\u4ee5\u5728\u6709\u9650\u7684\u4ea7\u54c1\u5f00\u53d1\u65f6\u95f4\u5185\u8fdb\u884c\u91cd\u65b0\u8bbe\u8ba1\u5468\u671f\u7684\u6b21\u6570\u3002 \u5fae\u7535\u5b50\u5236\u9020\u662f\u5177\u6709\u6311\u6218\u6027\u7684\uff0c\u56e0\u4e3a\u5236\u9020\u7684\u7ec4\u4ef6\u7684\u5c0f\u5c3a\u5bf8\u548c\u5b83\u53ef\u4ee5\u5305\u62ec\u7684\u7279\u6027\uff0c\u4f7f\u5f97\u5fae\u7535\u5b50\u5236\u9020\u5bb9\u6613\u53d7\u5230\u73af\u5883\uff0c\u70ed\u548c\u7535\u6c14\u6761\u4ef6\u7684\u5f71\u54cd\u3002 \u4e86\u89e3\u8fd9\u4e9b\u6311\u6218\u548c\u8bb8\u591a\u5176\u4ed6\u6311\u6218\uff0c\u5bfc\u81f4\u5fae\u7535\u5b50\u5de5\u827a\u5de5\u7a0b\u4f5c\u4e3a\u4e00\u95e8\u72ec\u7acb\u7684\u5b66\u79d1\u51fa\u73b0\uff0c\u4ee5\u5e94\u5bf9\u8fd9\u4e00\u9886\u57df\u7684\u6311\u6218\u548c\u8fc5\u901f\u8fdb\u6b65\u3002<\/p>\n<p data-pid=\"8Hk3lUTJ\">\u4eceCAD\u8bbe\u8ba1\u5f00\u59cb\uff0c\u6700\u7ec8\u4ee5\u5de5\u4f5c\u5668\u4ef6\u7ed3\u675f\uff0c\u9700\u8981\u9075\u5faa\u8bb8\u591a\u5236\u9020\u6b65\u9aa4\u548c\u7a0b\u5e8f\u3002 \u5bf9\u4e8e\u9ad8\u4ea7\u91cf\u548c\u9ad8\u76f4\u901a\u7387\u7684\u76ee\u6807\uff0c\u8fd9\u4e9b\u6b65\u9aa4\u9700\u8981\u5f7b\u5e95\u9a8c\u8bc1\uff0c\u4ee5\u63d0\u4f9b\u4e00\u81f4\u7684\u7ed3\u679c\uff0c\u4ece\u800c\u53ef\u4ee5\u9501\u5b9a\u8fd9\u4e00\u7279\u5b9a\u5668\u4ef6\u7684\u5de5\u827a\u8fc7\u7a0b\u3002 \u5de5\u827a\u5b9e\u9a8c\u53ef\u4ee5\u5305\u62ec\u6750\u6599\u9009\u62e9\u7684\u51e0\u4e2a\u8bd5\u9a8c\uff0c\u6750\u6599\u5c42\u7684\u751f\u957f\u65b9\u6cd5\uff0c\u5c42\u5bf9\u5c42\u7684\u5bf9\u9f50\u65b9\u6cd5\uff0c\u4ee5\u53ca\u6750\u6599\u56fe\u6848\u5316\u65b9\u6cd5\u3002\u4ece\u4e00\u4e2a\u5236\u9020\u5546\u5230\u53e6\u4e00\u4e2a\u5236\u9020\u5546\uff0c \u6bcf\u4e00\u4e2a\u90fd\u53ef\u4ee5\u662f\u4e0d\u540c\u7684\uff0c\u4e3a\u4efb\u4f55\u4eba\u521b\u9020\u4e86\u5927\u91cf\u7684\u7a7a\u95f4\u6765\u53d1\u660e\u65b0\u7684\u5de5\u827a\u5236\u6210\u6280\u672f\u3002 \u4e3a\u4e86\u5e94\u5bf9\u5fae\u7535\u5b50\u5236\u9020\u7684\u590d\u6742\u6027\uff0c\u5177\u6709\u4e0d\u540c\u80cc\u666f\u7684\u4e2a\u4eba\uff08\u4f8b\u5982\u7269\u7406\u3001\u5316\u5b66\u3001\u7535\u6c14\u3001\u673a\u68b0\u5de5\u7a0b\u548c\u6750\u6599\u79d1\u5b66\uff09\u548c\u6700\u65b0\u6280\u672f\u548c\u8bbe\u5907\u7684\u57f9\u8bad\u6280\u80fd\u901a\u5e38\u534f\u540c\u53c2\u4e0e\u5de5\u4f5c\uff0c\u4ee5\u4f7f\u8fd9\u4e00\u5de5\u827a\u53d6\u5f97\u6210\u529f\u3002<\/p>\n<h2>\u5149\u523b\u5236\u4f5c\u6280\u672f<\/h2>\n<p data-pid=\"MTDlcZxY\">\u5149\u523b\uff08Photolithography fabrication\uff09\u662f\u901a\u8fc7\u5149\u6ce2\u5c06\u56fe\u6848\u4ece\u7248\u56fe\u6216\u63a9\u6a21\u8f6c\u79fb\u5230\u534a\u5bfc\u4f53\u6676\u5706\u8868\u9762\u7684\u5de5\u827a\u3002 \u56fe\u6848\u7684\u8f6c\u79fb\u673a\u5236\u9996\u5148\u4f7f\u7528\u4e00\u79cd\u5149\u654f\u805a\u5408\u7269\u6750\u6599\uff0c\u79f0\u4e3a\u5149\u523b\u80f6\u56fe\u6848\uff0c\u5176\u5f62\u72b6\u5b9a\u4e49\u5728\u63a9\u6a21\u4e0a\u3002 \u4e00\u65e6\u56fe\u6848\u4ece\u63a9\u6a21\u8f6c\u79fb\u5230\u5149\u523b\u80f6\uff0c\u7136\u540e\u4f7f\u7528\u5e72\u6cd5\u6216\u6e7f\u6cd5\u8680\u523b\u65b9\u6cd5\u5c06\u56fe\u6848\u4ece\u5149\u523b\u80f6\u8f6c\u79fb\u5230\u6676\u5706\u7684\u8868\u9762\u3002 \u8fd9\u4e2a\u5de5\u827a\u672c\u8eab\u7531\u51e0\u4e2a\u6b65\u9aa4\u7ec4\u6210\uff0c\u9700\u8981\u5efa\u7acb\u51e0\u4e2a\u5de5\u5177\u3002 \u56fe1\u6240\u793a\u7684\u56fe\u8868\u6982\u8ff0\u4e86\u57fa\u672c\u7684\u5149\u523b\u6b65\u9aa4\uff0c\u5e76\u7b80\u8981\u5730\u89e3\u91ca\u4e86\u6bcf\u4e00\u6b65\u3002<\/p>\n<p data-pid=\"qDA0dRTE\">\u6676\u5706\u6e05\u6d17\u901a\u5e38\u662f\u901a\u8fc7\u4e00\u5957\u6807\u51c6\u7684\u6b65\u9aa4\u6765\u8fdb\u884c\u7684\uff0c\u5e76\u4ece\u5c06\u6676\u5706\u8fd0\u884c\u5230\u6eb6\u5242\u4e2d\u4ee5\u6e05\u6d01\u6676\u5706\u8868\u9762\u53ef\u80fd\u5b58\u5728\u7684\u9897\u7c92\u548c\u6709\u673a\u6b8b\u7559\u7269\u5f00\u59cb\u7684\uff1a<\/p>\n<figure data-size=\"normal\">\n<div class=\"RichText-ConditionalImagePortal\"><img data-dominant-color=\"f2f2f2\" data-has-transparency=\"false\" style=\"--dominant-color: #f2f2f2;\" loading=\"lazy\" decoding=\"async\" class=\"not-transparent alignnone size-full wp-image-30842\" src=\"https:\/\/aiforumimage.oss-cn-shanghai.aliyuncs.com\/wp-content\/uploads\/2026\/11\/v2-0734b0aa8af8e641cbc75627118faa61_1440w.jpg\" width=\"502\" height=\"495\" srcset=\"https:\/\/aiforumimage.oss-cn-shanghai.aliyuncs.com\/wp-content\/uploads\/2026\/11\/v2-0734b0aa8af8e641cbc75627118faa61_1440w.jpg 502w, https:\/\/aiforumimage.oss-cn-shanghai.aliyuncs.com\/wp-content\/uploads\/2026\/11\/v2-0734b0aa8af8e641cbc75627118faa61_1440w-300x296.jpg 300w, https:\/\/aiforumimage.oss-cn-shanghai.aliyuncs.com\/wp-content\/uploads\/2026\/11\/v2-0734b0aa8af8e641cbc75627118faa61_1440w-150x148.jpg 150w\" sizes=\"auto, (max-width: 502px) 100vw, 502px\" \/><\/div>\n<\/figure>\n<p data-pid=\"D9RAbHyb\">\u56fe1\u3001\u00a0\u5149\u523b\u5de5\u827a\u6d41\u7a0b\u4e2d\u6d89\u53ca\u7684\u57fa\u672c\u6b65\u9aa4<\/p>\n<p data-pid=\"2LX8YfRB\">\u63a5\u4e0b\u6765\uff0c\u6676\u7247\u88ab\u5f7b\u5e95\u6d78\u6ce1\u5728\u53bb\u79bb\u5b50\u6c34(DI\uff0c deionized water)\u4e2d\uff0c\u4ee5\u53bb\u9664\u4efb\u4f55\u5269\u4f59\u7684\u6eb6\u5242\uff0c\u7136\u540e\u518d\u8fdb\u884cRCA\u6e05\u6d01\u3002 \u8be5RCA\u6e05\u6d01\u6c27\u5316\u6676\u5706\u63d0\u4f9b\u4e00\u5c42\u8584\u7684\u6c27\u5316\u7269\u4fdd\u62a4\u5c42\u5230\u6676\u5706\u8868\u9762\u3002 \u7136\u540e\u5c06\u6676\u5706\u6d78\u6ce1\u5728\u6c22\u6c1f\u9178(HF\uff0chydrofluoric acid)\u4e2d\uff0c\u4ee5\u53bb\u9664\u6676\u5706\u8868\u9762\u7684\u6c27\u5316\u5c42\u3002 \u6700\u540e\uff0c\u6676\u5706\u88abDI\u51b2\u6d17\uff0c\u7136\u540e\u7528\u6c2e\u6c14\u5439\u5e72\u3002<\/p>\n<p data-pid=\"OvVWX2cP\">\u8584\u819c\u6750\u6599\u7684\u6c89\u79ef\u901a\u5e38\u91c7\u7528\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(CVD\uff0c chemical vapor deposition)\u6216\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD\uff0cphysical vapor deposition)\u3002 \u4f5c\u4e3a\u4e00\u4e2a\u6982\u5ff5\uff0c\u8fd9\u4e24\u79cd\u6d82\u5c42\u5de5\u827a\u7684\u5e94\u7528\u90fd\u975e\u5e38\u5e7f\u6cdb\u3002 \u534a\u5bfc\u4f53\u5236\u9020\u5546\u901a\u5e38\u91c7\u7528\u66f4\u5177\u4f53\u7684\u884d\u751f\u6280\u672f\u3002 PVD\u4f7f\u7528\u7eaf\u6e90\u6750\u6599\uff0c\u901a\u8fc7\u84b8\u53d1\u6c14\u5316\u3002 PVD\u70ed\u4f9b\u5e94\u662f\u901a\u8fc7\u5e94\u7528\u5927\u529f\u7387\u7535\u6216\u6fc0\u5149\u70e7\u8680\u6765\u5b8c\u6210\u7684\u3002 \u7136\u540e\uff0c\u84b8\u53d1\u6750\u6599\u5c06\u901a\u8fc7\u771f\u7a7a\u6269\u6563\u5230\u57fa\u7247\u886c\u5e95\u8868\u9762\uff0c\u4ee5\u4ea7\u751f\u6240\u9700\u7684\u8584\u819c\u3002 \u7136\u800c\uff0cCVD\u4e0d\u9700\u8981\u7eaf\u6e90\u6750\u6599\uff0c\u4f46\u8be5\u6750\u6599\u4e0e\u6325\u53d1\u6027\u524d\u4f53\u6df7\u5408\u4f5c\u4e3a\u6750\u6599\u8f7d\u4f53\u3002 \u7136\u540e\uff0c\u5728\u4e00\u5b9a\u6e29\u5ea6\u4e0b\uff0c\u901a\u8fc7\u6c14\u4f53\u8f93\u9001\u7cfb\u7edf\u5c06\u6d82\u5c42\u6750\u6599\u6ce8\u5165\u5305\u56f4\u886c\u5e95\u57fa\u7247\u7684\u53cd\u5e94\u5ba4\u3002 \u7136\u540e\uff0c\u84b8\u6c14\u7269\u8d28\u4e0e\u5e95\u7269\u53cd\u5e94\u5e76\u6700\u7ec8\u6c89\u79ef\u5728\u5176\u4e0a\u3002 \u5728\u8fd9\u4e2a\u9636\u6bb5\uff0c\u524d\u9a71\u4f53\u6750\u6599\u5206\u89e3\u5e76\u79bb\u5f00\u6c89\u79ef\u5728\u886c\u5e95\u4e2d\u7684\u6750\u6599\u3002\u00a0CVD\u5de5\u827a\u6bd4PVD\u5de5\u827a\u9700\u8981\u66f4\u9ad8\u7684\u6e29\u5ea6\u3002 \u6839\u636e\u5e94\u7528\u7684\u4e0d\u540c\uff0c\u56e0\u4e3a\u51e0\u4e2a\u5de5\u827a\u5236\u6210\u65b9\u9762\u7684\u56e0\u7d20\uff0c\u5982\u5de5\u827a\u590d\u6742\u6027\u3001\u6240\u9700\u7684\u8584\u819c\u539a\u5ea6\u3001\u539f\u6750\u6599\u7684\u53ef\u7528\u6027\u548c\u6210\u672c\u539f\u56e0\uff0c\u4e00\u79cd\u65b9\u6cd5\u53ef\u80fd\u6bd4\u53e6\u4e00\u79cd\u65b9\u6cd5\u66f4\u597d\u3002 \u4e3a\u6b64\uff0c\u5728\u6e05\u6d17\u6676\u5706\u540e\uff0c\u5c4f\u969c\u6216\u949d\u5316\u5c42\uff0c\u5982\u4e8c\u6c27\u5316\u7845(SiO)2 \u901a\u5e38\u6c89\u79ef\u5728\u6676\u5706\u7684\u8868\u9762\u3002<\/p>\n<p data-pid=\"MyMvmrdr\">\u7136\u540e\uff0c\u5229\u7528\u6807\u51c6\u81ea\u65cb\u6d82\u5c42\u6280\u672f\u5c06\u5149\u523b\u80f6\u5c42\u5e94\u7528\u4e8e\u6676\u5706\u7684\u8868\u9762\uff0c\u901a\u8fc7\u6bcf\u5206\u949f\u51e0\u5343\u8f6e(RPM)\u9ad8\u901f\u65cb\u8f6c\u7684\u6676\u5706\u57fa\u677f\u4ea7\u751f\u79bb\u5fc3\u529b\uff0c\u80fd\u591f\u5747\u5300\u5730\u5c06\u5149\u523b\u80f6\u5c42\u5206\u5e03\u5728\u6676\u5706\u8868\u9762\u3002 \u6839\u636e\u5bf9\u5916\u52a0\u5149\u7684\u53cd\u5e94\uff0c\u5149\u523b\u80f6\u53ef\u5206\u4e3a\u6b63\u6297\u8680\u5242\u6216\u8d1f\u6297\u8680\u5242\u3002 \u5728\u6b63\u6297\u8680\u5242\u4e2d\uff0c\u66b4\u9732\u5728\u5916\u52a0\u5149\u4e0b\u7684\u6297\u8680\u5242\u662f\u53ef\u6eb6\u89e3\u7684\u90e8\u5206\uff0c\u56e0\u6b64\u53ef\u4ee5\u901a\u8fc7\u5149\u523b\u80f6\u663e\u5f71\u6db2\u53bb\u9664\uff0c\u800c\u672a\u66b4\u9732\u7684\u6297\u8680\u5242\u90e8\u5206\u4ecd\u7136\u4e0d\u6eb6\u3002\u00a0\u8d1f\u5149\u523b\u80f6\u7684\u4f5c\u7528\u65b9\u5f0f\u4e0e\u6b63\u6297\u8680\u5242\u76f8\u53cd\u3002 \u5728\u8fd9\u4e24\u8005\u4e4b\u95f4\uff0c\u6b63\u6297\u8680\u5242\u53d8\u5f97\u66f4\u52a0\u6d41\u884c\uff0c\u56e0\u4e3a\u5b83\u4eec\u4e3a\u5c0f\u51e0\u4f55\u7279\u5f81\u63d0\u4f9b\u4e86\u76f8\u5bf9\u66f4\u597d\u7684\u8fc7\u7a0b\u53ef\u63a7\u6027\u3002<\/p>\n<p data-pid=\"Ic7BJDpi\">\u5176\u6b21\uff0c\u8f6f\u70d8\u7119\u88ab\u7528\u6765\u53bb\u9664\u6240\u6709\u6eb6\u5242\u540e\uff0c\u5149\u523b\u80f6\u6d82\u5c42\u5de5\u827a\uff0c\u5728\u90a3\u91cc\u5149\u523b\u80f6\u53d8\u5f97\u5149\u654f\uff0c\u56e0\u6b64\u8f6f\u70d8\u7119\u662f\u51b3\u5b9a\u5149\u6210\u50cf\u8d28\u91cf\u7684\u5173\u952e\u6b65\u9aa4\u3002<\/p>\n<p data-pid=\"sv0894Qv\">\u5728\u5e94\u7528\u7b2c\u4e00\u4e2a\u5149\u63a9\u6a21\u540e\uff0c\u6bcf\u4e2a\u540e\u7eed\u63a9\u6a21\u5fc5\u987b\u4e0e\u524d\u4e00\u4e2a\u63a9\u6a21\u5bf9\u9f50\uff0c\u4ee5\u4fbf\u80fd\u591f\u51c6\u786e\u5730\u5c06\u56fe\u6848\u8f6c\u79fb\u5230\u6676\u5706\u8868\u9762\u3002 \u63a9\u6a21\u5bf9\u51c6\u662f\u4f7f\u7528\u63a9\u6a21\u548c\u6676\u5706\u4e0a\u7684\u5bf9\u51c6\u6807\u8bb0\u6765\u5728\u5149\u66b4\u9732\u524d\u767b\u8bb0\u56fe\u6848\u3002 \u4e00\u65e6\u63a9\u6a21\u5bf9\u9f50\uff0c\u5149\u523b\u80f6\u5c31\u4f1a\u901a\u8fc7\u5177\u6709\u9ad8\u5f3a\u5ea6\u5149\u6e90\u7684\u56fe\u6848\u63a9\u6a21\u66dd\u5149\uff0c\u4ece\u800c\u5f62\u6210\u9884\u671f\u7684\u56fe\u6848\u3002<\/p>\n<p data-pid=\"5cbbu2lS\">\u5176\u6b21\uff0c\u5728\u5149\u523b\u8fc7\u7a0b\u4e2d\uff0c\u786c\u70d8\u7119\u6b65\u9aa4\u662f\u5fc5\u8981\u7684\uff0c\u4ee5\u786c\u5316\u6240\u5f00\u53d1\u7684\u5149\u523b\u80f6\uff0c\u5e76\u63d0\u9ad8\u4e0e\u6676\u7247\u8868\u9762\u7684\u9644\u7740\u529b\u3002<\/p>\n<p data-pid=\"ashpeG7f\">\u786c\u70e4\u53ef\u80fd\u662f\u4e0d\u5fc5\u987b\u7684\u5de5\u827a\uff0c\u800c\u8f6f\u70d8\u7119\u662f\u9700\u8981\u7684\uff0c\u5982\u5728\u91d1\u5c5e\u63d0\u5347\u6a21\u5f0f\u3002<\/p>\n<p data-pid=\"lyPyr3HY\">\u7136\u540e\u5c06\u4e0d\u9700\u8981\u7684\u5149\u523b\u80f6\u6750\u6599\u548c\u6b8b\u7559\u7269\u8680\u523b\u6389\uff0c\u4ece\u800c\u5728\u6676\u5706\u8868\u9762\u5f62\u6210\u56fe\u6848\u3002 \u6a21\u5f0f\u8f6c\u79fb\u5230\u6676\u5706\u8868\u9762\u53ef\u4ee5\u4f7f\u7528\u4e09\u79cd\u65b9\u6cd5\u4e4b\u4e00\uff1a\u51cf\u6cd5\u8f6c\u79fb\uff08\u523b\u8680)\u3001\u6dfb\u52a0\u5242\u8f6c\u79fb(\u9009\u62e9\u6027\u6c89\u79ef)\u548c\u6742\u8d28\u63ba\u6742(\u79bb\u5b50\u6ce8\u5165\uff09\u3002 \u51cf\u6cd5\u91c7\u7528\u6e7f\u5316\u5b66\u6216\u5e72\u7b49\u79bb\u5b50\u4f53\u523b\u8680\uff0c\u8fd9\u662f\u6700\u5e38\u7528\u7684\u6a21\u5f0f\u8f6c\u79fb\u65b9\u6cd5\u3002 \u7136\u800c\uff0c\u5e72\u5f0f\u8680\u523b\u5bf9\u6e7f\u5f0f\u8680\u523b\u63d0\u4f9b\u4e86\u76f8\u5bf9\u66f4\u591a\u7684\u8f6e\u5ed3\u63a7\u5236\u3002<\/p>\n<p data-pid=\"_JKLZA4P\">\u8981\u5728\u63a9\u6a21\u4e0a\u5370\u5237\u548c\u56fe\u6848\u5316\u5c0f\u7279\u5f81\uff0c\u9700\u8981\u6839\u636e\u65b9\u7a0b\uff081\uff09\u6765\u4f7f\u7528\u6ce2\u957f\u8f83\u77ed\u7684\u5149\u6e90\uff1a<\/p>\n<figure data-size=\"normal\">\n<div class=\"RichText-ConditionalImagePortal\"><img data-dominant-color=\"f5f6f5\" data-has-transparency=\"false\" style=\"--dominant-color: #f5f6f5;\" loading=\"lazy\" decoding=\"async\" class=\"not-transparent alignnone size-full wp-image-30843\" src=\"https:\/\/aiforumimage.oss-cn-shanghai.aliyuncs.com\/wp-content\/uploads\/2026\/11\/v2-d8b5539543ad22e2682d40fb2b824339_1440w.png\" width=\"126\" height=\"81\" \/><\/div>\n<\/figure>\n<p data-pid=\"GbgYgAOe\">\u65b9\u7a0b\uff081\uff09<\/p>\n<p data-pid=\"qx2RQOZa\">\u4e0a\u5f0f\u4e2dR\u662f\u5206\u8fa8\u7387\uff0cNA\u662f\u786e\u5b9a\u5149\u6e90\u53ef\u4ee5\u53d1\u51fa\u5149\u7684\u89d2\u5ea6\u8303\u56f4\u7684\u5b54\u5f84\u6570\u503c\uff0c\u800c\u03bb\u662f\u65bd\u52a0\u5149\u7684\u6ce2\u957f\u3002<\/p>\n<h2>\u886c\u5e95\u6280\u672f<\/h2>\n<p data-pid=\"kvAXaLku\">\u886c\u5e95\u57fa\u677f\u662f\u57fa\u672c\u7684\u5efa\u7b51\u7ed3\u6784\uff0c\u7528\u4e8e\u63d0\u4f9b\u673a\u68b0\u652f\u6301\u548c\u7535\u6c14\u8fde\u63a5\u5230\u5728\u51e0\u4e4e\u4efb\u4f55\u5c04\u9891\u7535\u8def\u4e2d\u7684\u7535\u5b50\u5143\u4ef6\u4e2d\u3002 \u5728\u51b3\u7b56\u8fc7\u7a0b\u4e2d\uff0c\u5728\u4e3a\u7279\u5b9a\u5e94\u7528\u9009\u62e9\u5408\u9002\u7684\u886c\u5e95\u6280\u672f\u65f6\uff0c\u9664\u4e86\u5236\u9020\u6210\u672c\u548c\u4e0e\u7279\u5b9a\u5236\u9020\u6280\u672f\u7684\u517c\u5bb9\u6027\u5916\uff0c\u8fd8\u5fc5\u987b\u8003\u8651\u7535\u6c14\u3001\u673a\u68b0\u3001\u5316\u5b66\u548c\u70ed\u53c2\u6570\u7b49\u51e0\u79cd\u6750\u6599\u6027\u80fd\u3002 \u65e0\u8bba\u57fa\u677f\u662f\u5171\u70e7\u9676\u74f7\uff08\u4f8b\u5982\u6c27\u5316\u94dd\uff09\u3001PCB(\u4f8b\u5982FR4)\u6216\u534a\u5bfc\u4f53\u57fa\u677f\uff0c\u4e8b\u5148\u4e86\u89e3\u6750\u6599\u6027\u80fd\u5bf9\u4e8e\u4e86\u89e3\u57fa\u677f\u548c\u5bfc\u4f53\u7684\u4e0d\u540c\u6027\u80fd\u662f\u5982\u4f55\u5f71\u54cd\u5230\u7279\u5b9a\u8bbe\u8ba1\u7684\u6027\u80fd\u662f\u81f3\u5173\u91cd\u8981\u7684\u3002<\/p>\n<p data-pid=\"XjO0AKXX\">\u5171\u70e7\u9676\u74f7\u57fa\u677f\u5728\u4ecb\u7535\u6750\u6599\u7eaf\u5ea6\u548c\u8bb8\u591a\u5176\u4ed6\u6027\u80fd\u65b9\u9762\u6709\u7740\u5e7f\u6cdb\u7684\u54c1\u79cd\u3002 \u9676\u74f7\u57fa\u677f\u9002\u7528\u4e8e\u9ad8\u5bb9\u91cf\u751f\u4ea7\uff0c\u53ef\u7528\u4e8e\u9ad8\u5fae\u6ce2\u9891\u7387(\u9ad8\u8fbe50G Hz~)\uff0c\u8fd9\u53d6\u51b3\u4e8e\u5bfc\u4f53\u548c\u4ecb\u7535\u6750\u6599\u5728\u635f\u8017\u65b9\u9762\u7684\u9009\u62e9\u3002 \u5171\u70e7\u9676\u74f7\u53ef\u7528\u4e8e\u9ad8\u5bc6\u5ea6\u5c04\u9891\u4e92\u8fde\u7ebf\uff0c\u652f\u6301\u6709\u6e90\u548c\u65e0\u6e90\u5143\u4ef6\uff0c\u5e76\u63d0\u4f9b\u975e\u5e38\u53ef\u9760\u7684\u5bc6\u5c01\u5c01\u88c5\u89e3\u51b3\u65b9\u6848\uff0c\u5177\u6709\u5e7f\u6cdb\u7684\u597d\u5904\uff0c\u5305\u62ec\u9632\u6b62\u6f6e\u6e7f\uff0c\u70ed\uff0c\u70ed\u81a8\u80c0\uff0c\u673a\u68b0\u51b2\u51fb\u548c\u8150\u8680\u7b49\u3002 \u9676\u74f7\u591a\u5c42\u57fa\u677f\u4e5f\u6709\u5229\u4e8e\u5728\u5c42\u538b\u677f\u5185\u5b9e\u73b0\u5d4c\u5165\u5f0f\u7535\u611f\u548c\u7535\u5bb9\u5668\uff0c\u56e0\u6b64\u5728\u7ed9\u5b9a\u7684\u8bbe\u8ba1\u4e2d\u53ef\u4ee5\u51cf\u5c11\u8868\u9762\u5b89\u88c5\u7ec4\u4ef6\u7684\u6570\u91cf\u3002 \u5171\u70e7\u9676\u74f7\u7684\u4e24\u79cd\u4e3b\u8981\u7c7b\u578b\u662f\u4f4e\u6e29\u5171\u70e7\u9676\u74f7(LTCCs\uff0clow temperature co-fired ceramics)\u548c\u9ad8\u6e29\u5171\u70e7\u9676\u74f7(HTCCs\uff0c high temperature co-fired ceramics)\u3002 \u4e24\u79cd\u7c7b\u578b\u7684\u70e7\u7ed3\u7684\u6e29\u5ea6\u7684\u533a\u522b\u5927\u7ea6\u662f900\u25cb \u7528\u4e8eLTCC\u548c1500\u25cb\u4e3aHTCC\u3002 \u4e0eHTCC\u76f8\u6bd4\uff0cLTCC\u6240\u9700\u7684\u8f83\u4f4e\u6e29\u5ea6\u662f\u7531\u4e8e\u4e8b\u5b9e\u4e0aLT CC\u6709\u8f83\u9ad8\u7684\u73bb\u7483\u542b\u91cf\uff0c\u4f7f\u5f97\u80fd\u5728\u8f83\u4f4e\u7684\u6e29\u5ea6\u4e0a\u7ed3\u5408\u9676\u74f7\u6676\u7c92\u3002 LTCC\u4e5f\u88ab\u79f0\u4e3a\u73bb\u7483\u9676\u74f7\uff0c\u56e0\u4e3a\u9664\u4e86\u5c11\u91cf\u7684\u7ed3\u5408\u5242\u5916\uff0c\u73bb\u7483\u8fd8\u4e0e\u7279\u5b9a\u6210\u5206\u7684\u6c27\u5316\u94dd\u6df7\u5408\uff0c\u4ee5\u4ea7\u751f\u5747\u5300\u7684\u5316\u5408\u7269\u3002 LTCC\u548cHTCC\u90fd\u662f\u4e3a\u4e86\u6784\u9020\u4e00\u4e2a\u4e0e\u91d1\u5c5e\u5171\u70e7\u7684\u591a\u5c42\u9676\u74f7\u57fa\u677f\u800c\u5236\u9020\u7684\u3002 \u5728\u91d1\u5c5e\u5316\u65b9\u9762\uff0cLTCC\u5728\u4f4e\u4e8e\u91d1\u5c5e\u7194\u70b9\u7684\u6e29\u5ea6\u4e0b\u4f7f\u7528\u9ad8\u5bfc\u7535\u6750\u6599\u7684\u91d1\u5c5e\u7ec4\u6210\uff0c\u5982\u94dc\u3001\u91d1\u6216\u94f6\u3002 \u7136\u800c\uff0cHTCC\u4f7f\u7528\u7535\u963b\u7387\u76f8\u5bf9\u8f83\u9ad8\u7684\u91d1\u5c5e\uff0c\u5982\u94a8\u3001\u94bc\u6216\u94bc\u9530\uff0c\u5728\u9ad8\u6e29\u4e0b\u5171\u70e7\uff0c\u4ee5\u652f\u6301\u673a\u68b0\u521a\u6027\u548c\u957f\u671f\u53ef\u9760\u6027\u975e\u5e38\u91cd\u8981\u7684\u5e94\u7528\u3002<\/p>\n<p data-pid=\"6pEdKKSb\">\u5728LTCC\u6216HTCC\u4e2d\uff0c\u591a\u5c42\u57fa\u7ec4\u5206\u7684\u751f\u4ea7\u9996\u5148\u901a\u8fc7\u94f8\u9020\u9676\u74f7\u590d\u5408\u6750\u6599\u6765\u4ea7\u751f\u5747\u5300\u539a\u5ea6\u7684\u91d1\u5c5e\u7247\u3002 \u7136\u540e\uff0c\u91d1\u5c5e\u7247\u88ab\u56fe\u6848\u5316\uff0c\u5e76\u6839\u636e\u7ed9\u5b9a\u8bbe\u8ba1\u7684\u5e03\u5c40\u4f7f\u7528\u51b2\u5e8a\u6765\u521b\u5efa\u5b54\u6d1e\u3002 \u7136\u540e\uff0c\u4e09\u7ef4(3D)\u7ed3\u6784\u662f\u7531\u4e8c\u7ef4(2D)\u7247\u6784\u6210\u7684\uff0c\u5176\u4e2d\u901a\u5b54\u586b\u5145\u901a\u5e38\u4f7f\u7528\u539a\u819c\u4e1d\u7f51\u5370\u5237\u5de5\u827a\u3002 \u9676\u74f7\u591a\u5c42\u886c\u5e95\u7684\u5236\u5907\u5728\u52a0\u5de5\u987a\u5e8f\u4e0a\u4e0d\u540c\u4e8e\u534a\u5bfc\u4f53\u886c\u5e95\u3002 \u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u5c42\u88ab\u4f9d\u6b21\u52a0\u5de5\u5728\u5f7c\u6b64\u7684\u9876\u90e8\uff1b\u800c\u5728\u9676\u74f7\u5236\u9020\u8fc7\u7a0b\u4e2d\uff0c\u6bcf\u4e00\u5c42\u88ab\u5355\u72ec\u56fe\u6848\u5316\uff0c\u7136\u540e\u5806\u53e0\u548c\u5171\u70e7\uff0c\u4ee5\u5efa\u7acb\u5747\u5300\u7684\u591a\u5c42\u7ed3\u6784\u3002<\/p>\n<p data-pid=\"RYDu3qp5\">LTCC\u548cHTCC\u6280\u672f\u7684\u5173\u952e\u533a\u522b\u5305\u62ec\uff1a<\/p>\n<p data-pid=\"5PKtsirz\">\u25cf \u4e0eHTCC\u76f8\u6bd4\uff0cLTCC\u5177\u6709\u8f83\u4f4e\u7684\u4ecb\u7535\u5e38\u6570\u548c\u8f83\u4f4e\u7684\u635f\u8017<\/p>\n<p data-pid=\"Y10tTN2f\">\u25cf HTCC\u5177\u6709\u8f83\u9ad8\u7684\u6e29\u5ea6\u548c\u673a\u68b0\u7a33\u5b9a\u6027<\/p>\n<p data-pid=\"l0MNbZEF\">\u25cf LTCC\u5177\u6709\u8f83\u9ad8\u7684\u91d1\u5c5e\u5bfc\u7535\u6027<\/p>\n<p data-pid=\"evXLl8AY\">\u25cf LTCC\u5c42\u6570\u8f83\u9ad8\uff1b<\/p>\n<p data-pid=\"9VWsjg2F\">\u25cf LTCC\u5236\u9020\u5468\u671f\u8f83\u77ed\uff1b<\/p>\n<p data-pid=\"bOheyr69\">\u25cf LTCC\u4f7f\u7528\u76f8\u5bf9\u4f4e\u6210\u672c\u7684\u5de5\u5177\u3002<\/p>\n<p data-pid=\"AktLWBy-\">\u91c7\u7528\u4f4e\u6210\u672c\u963b\u71c34(FR4\uff0cflame retardant 4)\u6750\u6599\u7684PCB\u57fa\u677f\u662f\u7531\u73bb\u7483\u589e\u5f3a\u73af\u6c27\u6811\u8102\u5236\u6210\u7684\uff0c\u9002\u7528\u4e8e\u4f4e\u9891\u5e94\u7528\u3002 FR4\u4ecb\u8d28\u6750\u6599\u7684\u635f\u8017\u89d2\u6b63\u5207\u662f\u9650\u5236\u5176\u9ad8\u9891\u5e94\u7528\u7684\u4e00\u4e2a\u9650\u5236\u56e0\u7d20\u3002 \u5176\u4ed6PCB\u57fa\u677f\uff0c\u5982\u7f57\u6770\u65af\uff08Rogers\uff09\u7684\u5c42\u538b\u677f\uff0c\u63d0\u4f9b\u4f4e\u635f\u8017\u6750\u6599\uff0c\u53ef\u4f7f\u7528\u9ad8\u8fbe20GHz\uff0c\u5408\u7406\u7684\u63d2\u5165\u635f\u8017\u3002 \u67d4\u6027\u548c\u6709\u673a\u591a\u6c2f\u8054\u82ef\u4e5f\u662f\u53ef\u7528\u7684\uff0c\u5b83\u4eec\u7684\u4f7f\u7528\u4e3b\u8981\u4e0e\u53ef\u7a7f\u6234\u533b\u7597\u8bbe\u5907\u4ee5\u53ca\u673a\u5668\u4eba\u7b49\u8f7b\u91cf\u7ea7\u79fb\u52a8\u8bbe\u5907\u6709\u5173\u3002 \u9676\u74f7\u57fa\u677f\u5728\u5177\u6709\u8f83\u4f4e\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u65b9\u9762\u4f18\u4e8ePCB\u57fa\u677f\uff0c\u53ef\u4ee5\u5728\u8f83\u9ad8\u7684\u6e29\u5ea6\u4e0b\u5de5\u4f5c\uff0c\u80fd\u591f\u5b9e\u73b0\u5bc6\u5c01\u5c01\u88c5\uff0c\u63d0\u4f9b\u66f4\u597d\u7684\u70ed\u6027\u80fd\u3001\u66f4\u597d\u7684\u9ad8\u9891\u6027\u80fd\uff0c\u5e76\u901a\u8fc7\u5728\u591a\u5c42\u57fa\u677f\u4e2d\u5d4c\u5165\u65e0\u6e90\u5143\u4ef6\u4ee5\u5b9e\u73b0\u8f83\u5c0f\u7684\u5c01\u88c5\u5c3a\u5bf8\u6765\u5b9e\u73b0\u9ad8\u7684\u96c6\u6210\u5bc6\u5ea6\u3002<\/p>\n<p data-pid=\"qC3sUY-W\">\u4e0b\u9762\u7684\u8ba8\u8bba\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u5f3a\u8c03\u4e86\u4e0d\u540c\u7684\u534a\u5bfc\u4f53\u886c\u5e95\u6280\u672f\uff0c\u8fd9\u4e9b\u6280\u672f\u4e3b\u8981\u4e0eRFICs\u548cMICs\u7684\u5236\u9020\u76f8\u5173\u3002 \u534a\u5bfc\u4f53\u886c\u5e95\u6750\u6599\u5206\u4e3a\u5143\u7d20\u534a\u5bfc\u4f53\u548c\u5316\u5408\u7269\u534a\u5bfc\u4f53\u4e24\u5927\u7c7b\uff1a.<\/p>\n<p data-pid=\"8sTT-X_0\">\u25cf \u5355\u5143\u7d20\u534a\u5bfc\u4f53\uff0c\u5728\u5143\u7d20\u5468\u671f\u8868\u7684IV\u65cf\u4e2d\u53d1\u73b0\uff0c\u5982\u7845(Si)\u3002<\/p>\n<p data-pid=\"lICBtkKs\">\u25cf \u5316\u5408\u7269\u534a\u5bfc\u4f53\u53ef\u8fdb\u4e00\u6b65\u5206\u4e3a\u4e09\u4e2a\u4e9a\u7c7b\uff1a.<\/p>\n<p data-pid=\"npfQXQ6j\">\u2013 \u4e8c\u5143\u7d20\u5316\u5408\u7269\u7531III-V\u65cf\u5143\u7d20(\u5982GaAs\u548cAlP)\u548cII-VI\u7ec4\u5143\u7d20(\u5982ZnS)\u7ec4\u6210\u3002<\/p>\n<p data-pid=\"DHId4yNv\">\u2013 \u4e09\u5143\u7d20\u5316\u5408\u7269\u7531III-V\u65cf\u5143\u7d20\u5f62\u6210\uff0c\u5982InGaAs\u548cAlGaAs\u7b49\u3002<\/p>\n<p data-pid=\"A9gY73UQ\">\u2013\u00a0\u56db\u5143\u7d20\u5316\u5408\u7269\u7531III\u65cf\u548cV\u65cf\u4e2d\u7684\u56db\u4e2a\u5143\u7d20\u7ec4\u6210\uff0c\u5982InGaAsP\u3002<\/p>\n<p data-pid=\"NlIPMd1l\">\u7531\u4e8e\u4f20\u7edf\u7684Si\u5149\u523b\u5de5\u827a\u7684\u6210\u719f\uff0cSi\u6676\u5706\u57fa\u677f\u662f\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7528\u4e8e\u5b9e\u73b0\u5927\u591a\u6570RFICs\u7684\u4e3b\u8981\u6750\u6599\u3002 \u53e6\u4e00\u79cd\u5728\u7279\u5b9a\u5e94\u7528\u4e2d\u83b7\u5f97\u7275\u5f15\u529b\u7684\u886c\u5e95\u6750\u6599\u662f\u7837\u5316\u9553(GaAs)\uff0c\u5b83\u5728MMIC\u4e2d\u7684\u5e94\u7528\u66f4\u4e3a\u7a81\u51fa\u3002 GaAs\u662f\u4e00\u79cd\u534a\u7edd\u7f18\u886c\u5e95\uff0c\u5176\u5143\u4ef6\u5177\u6709\u8f83\u4f4e\u7684\u7535\u5bb9\u635f\u8017\u548c\u5bfc\u4f53\u635f\u8017\u3002GaAs\u88ab\u5f00\u53d1\u5e76\u7528\u4e8e\u96c6\u6210\u7535\u8def\u5236\u9020\uff0c\u4ee5\u514b\u670dSi\u57fa\u677f\u5668\u4ef6\u5728\u9ad8\u9891\u4f7f\u7528\u65f6\u9047\u5230\u7684\u5de5\u4f5c\u9891\u7387\u9650\u5236\u3002 \u4e0eSi\u76f8\u6bd4\uff0cGaAs\u6750\u6599\u7684\u9ad8\u7535\u5b50\u8fc1\u79fb\u7387\u4f7fGaAs\u5728\u9ad8\u901f\u7535\u8def\u4e2d\u5904\u4e8e\u6709\u5229\u5730\u4f4d\u3002 \u7136\u800c\uff0c\u9ad8\u6602\u7684\u5236\u9020\u6210\u672c\u9650\u5236\u4e86\u5176\u7ecf\u6d4e\u53ef\u884c\u6027\u3002 \u7845\u9517\uff08SiGe\uff09 \u662f\u5c06Si\u5236\u9020\u7684\u52a0\u5de5\u6210\u719f\u5ea6\u3001\u96c6\u6210\u6c34\u5e73\u548c\u6210\u672c\u6548\u76ca\u4e0eGaAs\u7b49\u66f4\u6602\u8d35\u6280\u672f\u7684\u901f\u5ea6\u548c\u6027\u80fd\u76f8\u7ed3\u5408\u7684\u53e6\u4e00\u79cd\u534a\u5bfc\u4f53\u6280\u672f\u3002 \u4e0eSi\u6280\u672f\u5236\u9020\u7684\u6676\u4f53\u7ba1\u76f8\u6bd4\uff0cSiGe\u57fa\u6676\u4f53\u7ba1\u7684\u7535\u6d41\u3001\u566a\u58f0\u548c\u529f\u7387\u80fd\u529b\u6709\u4e86\u663e\u8457\u7684\u63d0\u9ad8\u3002 SiGe\u975e\u5e38\u9002\u5408\u9700\u8981\u9ad8\u9891\u5de5\u4f5c\uff08GHz\u9891\u7387\u8303\u56f4)\u548c\u9ad8\u901f\u901a\u4fe1\u7535\u8def(\u5982\u6570\u636e\u8f6c\u6362\u5668\uff09\u7684\u5e94\u7528\u9886\u57df\u3002 \u9884\u8ba1\u672a\u6765\u51e0\u5e74\uff0cSiGe\u7684\u5e02\u573a\u4efd\u989d\u5c06\u589e\u52a0\uff0c\u7279\u522b\u662f\u968f\u77405G\u7f51\u7edc\u7684\u90e8\u7f72\u548c\u5bf9\u5927\u89c4\u6a21\u4e92\u8054\u7f51\u8fde\u63a5\u7684\u9700\u6c42\u3002 \u7136\u800c\uff0c\u76ee\u524d\uff0cSiGe\u6b63\u9762\u4e34\u6765\u81ea\u66ff\u4ee3\u6280\u672f\u7684\u9ad8\u5ea6\u7ade\u4e89\u3002<\/p>\n<p data-pid=\"LNii7D5N\">\u7eaf\u7845\u57fa\u677f\u662f\u4e00\u79cd\u4f4e\u7535\u963b\u6750\u6599\uff0c\u5bf9\u5757\u4f53Si\u57fa\u5668\u4ef6\u7684\u91d1\u5c5e\u7ed3\u6784\u9020\u6210\u4ecb\u8d28\u635f\u8017\u3002 \u56e0\u6b64\uff0c\u5728Si\u886c\u5e95\u4e0a\u5b9e\u73b0\u7684\u65e0\u6e90\u7ec4\u4ef6\u6bd4\u5728GaAs\u886c\u5e95\u4e0a\u5b9e\u73b0\u7684\u65e0\u6e90\u7ec4\u4ef6\u5177\u6709\u66f4\u4f4e\u7684Q\u503c\u3002\u5bf9\u4f4e\u529f\u8017\u5fae\u7535\u5b50\u6280\u672f\u7684\u9700\u8981\u63a8\u52a8\u4e86\u51e0\u79cd\u6676\u5706\u886c\u5e95\u6280\u672f\u7684\u53d1\u5c55\uff0c\u4ee5\u5728\u5757\u4f53Si\u886c\u5e95\u548c\u5668\u4ef6\u91d1\u5c5e\u5c42\u4e4b\u95f4\u5b9e\u73b0\u7edd\u7f18\uff0c\u5982\u84dd\u5b9d\u77f3\u4e0a\u7684\u7845(SOS\uff0csilicon on sapphire)\u548c\u7edd\u7f18\u4f53\u4e0a\u7684\u7845(SOI\uff0c silicon on insulator)\u3002<\/p>\n<h2>\u84dd\u5b9d\u77f3\u4e0a\u7684\u7845(SOS\uff0csilicon on sapphire)<\/h2>\n<p data-pid=\"oKjDDB_7\">SOS\u662f20\u4e16\u7eaa60\u5e74\u4ee3\u53d1\u5c55\u8d77\u6765\u7684\u4e00\u79cd\u6676\u5706\u57fa\u677f\u6280\u672f\uff0c\u662f\u751f\u4ea7\u9ad8\u901f\u4f4e\u529f\u8017\u5668\u4ef6\u7684\u9014\u5f84\u3002 \u5176\u4e2dSOS\u7684\u4e3b\u8981\u4f18\u70b9\u4e4b\u4e00\u662f\u5177\u6709\u4f18\u826f\u7684\u7ebf\u6027\u6027\u80fd\uff0c\u8fd9\u662f\u5927\u529f\u7387RFFE\uff08\u5c04\u9891\u524d\u7aef\uff09\u6a21\u5757\u7684\u5173\u952e\u8981\u6c42\u3002 \u7136\u800c\uff0cSOS\u7684\u53ef\u5236\u9020\u6027\u662f\u4e00\u4e2a\u9650\u5236\u56e0\u7d20\uff0c\u56e0\u4e3a\u5f62\u6210\u5177\u6709\u6700\u5c0f\u7ed3\u6676\u7f3a\u9677\u7684Si\u5c42\u4e3b\u8981\u56f0\u96be\u963b\u788d\u4e86\u5927\u6279\u91cf\u751f\u4ea7\u7684\u6f5c\u529b\uff0c\u56e0\u6b64\u4e5f\u963b\u788d\u4e86SOS\u5668\u4ef6\u4ea7\u54c1\u5546\u4e1a\u5316\u7684\u6f5c\u529b\u3002\u00a0\u7f8e\u56fd\u516c\u53f8Peregrine\u534a\u5bfc\u4f53\u516c\u53f8\u6700\u8fd1\u7684\u53d1\u5c55\u6781\u5927\u5730\u6539\u5584\u4e86\u84dd\u5b9d\u77f3\u6676\u7247\u4e0aSi\u8584\u819c\u7684\u7ed3\u6676\u7279\u6027\uff0c\u4e3aRFIC\u5668\u4ef6\u5236\u9020\u5546\u4eca\u540e\u53ef\u80fd\u91c7\u7528\u548c\u8003\u8651\u94fa\u5e73\u4e86\u9053\u8def\u3002 \u672c\u8d28\u4e0a\uff0cSOS\u886c\u5e95\u662f\u5229\u7528\u5916\u5ef6\u751f\u957f\u5728\u84dd\u5b9d\u77f3\u886c\u5e95\u4e0a\u6c89\u79efSi\u819c\u800c\u4ea7\u751f\u7684\u3002 \u53cd\u8fc7\u6765\uff0c\u8fd9\u5c06\u4ea7\u751f\u7ed3\u6676\u7f3a\u9677\uff0c\u56e0\u4e3a\u6676\u683c\u4e0d\u5339\u914d\u84dd\u5b9d\u77f3\u3002 \u8fd9\u4e00\u7f3a\u9677\u662f\u901a\u8fc7\u5728Si\u819c\u5185\u690d\u5165Si\u79bb\u5b50\u6765\u6d88\u9664Si\u819c\u5728\u4e0e\u84dd\u5b9d\u77f3\u886c\u5e95\u7684\u754c\u9762\u4e0a\u7684\u7ed3\u6676\u6548\u5e94\uff0c\u5e76\u5c06\u5176\u8f6c\u5316\u4e3a\u975e\u6676\u6001\u6761\u4ef6\u3002 \u5728\u70ed\u5904\u7406\u548c\u6c27\u5316\u73af\u5883\u4e0b\uff0cSi\u819c\u88ab\u518d\u7ed3\u6676\u5f62\u6210\u3002\u7136\u540e\u53bb\u9664\u5269\u4f59\u7684SiO2 \u8584\u819c\u4ee5\u83b7\u5f97\u6240\u9700\u7684SOS\u886c\u5e95\u3002<\/p>\n<h2>\u7edd\u7f18\u4f53\u4e0a\u7684\u7845\uff08SOI\uff09<\/h2>\n<p data-pid=\"v42Puhp6\">SOI\u886c\u5e95\u7684\u57fa\u672c\u7ed3\u6784\u662f\u5728\u9876\u90e8\u8584Si\u5c42\u548c\u5757\u4f53Si\u886c\u5e95\u4e4b\u95f4\u5f62\u6210SiO2 \u5c42\uff0c\u800c\u5668\u4ef6\u662f\u5efa\u7acb\u5728\u5176\u4e2d\u7684\u3002 \u5728\u82af\u7247\u5236\u9020\u4e2d\uff0cSOI\u6676\u7247\u886c\u5e95\u6280\u672f\u88ab\u8ba4\u4e3a\u662f\u4e00\u4e2a\u8fdb\u5316\u7684\u6b65\u9aa4\uff0c\u4e0eSOS\u7b49\u5176\u4ed6\u6280\u672f\u76f8\u6bd4\u5177\u6709\u51e0\u4e2a\u4f18\u52bf\u3002 \u4e3b\u8981\u4f18\u70b9\u662f\u5668\u4ef6\u91d1\u5c5e\u5c42\u4e0e\u886c\u5e95\u4e4b\u95f4\u7684\u5bc4\u751f\u7535\u5bb9\u964d\u4f4e\uff1b\u56e0\u6b64\uff0c\u53ef\u4ee5\u83b7\u5f97\u66f4\u597d\u7684\u7535\u6c14\u6027\u80fd\u3002 \u4f8b\u5982\uff0cSOI\u886c\u5e95\u901a\u5e38\u7528\u4e8e\u5236\u9020\u5c04\u9891\u5f00\u5173\u7684\u57fa\u4e8e\u573a\u6548\u5e94\u7684\u6676\u4f53\u7ba1(FETs)\u51cf\u5c11\u6e90\u548c\u6f0f\u5230\u886c\u5e95\u7684\u7535\u5bb9\uff0c\u800c\u8fd9\u53cd\u8fc7\u6765\u53c8\u5bf9\u5f00\u5173\u9694\u79bb\u3001\u901f\u5ea6\u548c\u63d2\u5165\u635f\u8017\u4ea7\u751f\u663e\u8457\u5f71\u54cd\u3002 \u6b64\u5916\uff0cSOI\u886c\u5e95\u6280\u672f\u5728\u6e29\u5ea6\u4e0a\u7684\u6027\u80fd\u53d8\u5316\u8f83\u5c0f\uff0c\u4e0e\u5927\u591a\u6570\u4f20\u7edf\u7684\u5236\u9020\u5de5\u827a\u517c\u5bb9\uff0c\u4e0d\u9700\u8981\u7279\u6b8a\u7684\u57f9\u8bad\u548c\u8bbe\u5907\u6765\u5236\u9020\u3002<\/p>\n<p data-pid=\"ll6B7q0d\">\u6700\u5e38\u89c1\u7684SOI\u6676\u7247\u7684\u5236\u9020\u5de5\u827a\u662f\u901a\u8fc7\u6ce8\u5165\u6c27(SIMOX\uff0cseparation by implantation of oxygen)\u8fdb\u884c\u5206\u79bb\uff0c\u5f62\u6210\u5757\u72b6\u7845\u652f\u6491\u6676\u5706\u4e4b\u4e0a\u7684\u7535\u7edd\u7f18SiO2 \u5c42\u3002 \u5176\u4ed6\u5e94\u7528\u4f7f\u7528\u901a\u8fc7\u6ce8\u5165\u6c2e\u6c14(SIMNI\uff0cimplantation of nitrogen)\u8fdb\u884c\u5206\u79bb\uff0c\u5176\u4e2d\u6c27\u6c14\u88ab\u6c2e\u6c14\u6216\u6c27\u6c14\u548c\u6c2e\u6c14(SIMON)\u7684\u7ec4\u5408\u6240\u53d6\u4ee3\uff0c\u800c\u4e0d\u4ea7\u751f\u4efb\u4f55\u4e0d\u5229\u5f71\u54cd\u3002\u6240\u6709\u7684SIMOX\u3001SIMNI\u548cSIMON\u5de5\u827a\u90fd\u6709\u5f88\u597d\u7684\u80fd\u529b\u7cbe\u786e\u63a7\u5236\u6c27\u5316\u5c42\u7684\u539a\u5ea6\u3002 \u6c27\u6216\u6c2e\u79bb\u5b50\u88ab\u79bb\u5b50\u675f\u6ce8\u5165\u7845\u4e2d\u3002 \u79bb\u5b50\u675f\u7684\u80fd\u91cf\u51b3\u5b9a\u4e86\u7edd\u7f18\u5c42\u7684\u6df1\u5ea6\u4ee5\u53ca\u540e\u7eed\u7845\u8986\u76d6\u5c42\u7684\u539a\u5ea6\u3002<\/p>\n<p data-pid=\"ZezKIq7n\">\u867d\u7136SOI\u6280\u672f\u6b63\u5728\u6210\u4e3aIC\u884c\u4e1a\u9762\u4e34\u7684\u51e0\u4e2a\u6280\u672f\u6311\u6218\u7684\u7b54\u6848\uff0c\u4f46\u8d85\u8584SOI\u5c42\u7684\u751f\u4ea7\u4ee5\u5efa\u7acb\u5668\u4ef6\u7684\u4f53Si\u4e0e\u63a9\u57cb\u6c27\u5316\u7269\u5c42\u4e4b\u95f4\u7684\u4f4e\u8f6e\u5ed3\u4ee5\u53ca\u539a\u5ea6\u5747\u5300\u6027\u4ecd\u7136\u662f\u4e00\u4e2a\u7a81\u51fa\u7684\u6311\u6218\u3002 \u6b64\u5916\uff0c\u7531\u4e8e\u6c27\u5316\u5c42\u7684\u70ed\u5bfc\u7387\u4f4e(SiO2 \u4e3a0.4W\/m-K\uff0c\u5982\u679c\u4e0e\u7eaf\u5757\u72b6Si\u76f8\u6bd4(Si\u4e3a150W\/m-K))\uff0cSOI\u53ef\u80fd\u4f1a\u53d7\u5230\u81ea\u70ed\u6548\u5e94\u7684\u5f71\u54cd\u3002<\/p>\n<p data-pid=\"ZezKIq7n\">\n<p data-pid=\"ZezKIq7n\">\u6587\u7ae0\u6765\u81ea\uff1a\u77e5\u4e4e<\/p>\n<div class=\"pvc_clear\"><\/div>\n<p id=\"pvc_stats_30841\" class=\"pvc_stats total_only  \" data-element-id=\"30841\" style=\"\"><i class=\"pvc-stats-icon medium\" aria-hidden=\"true\"><svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" version=\"1.0\" viewBox=\"0 0 502 315\" preserveAspectRatio=\"xMidYMid meet\"><g transform=\"translate(0,332) scale(0.1,-0.1)\" fill=\"\" stroke=\"none\"><path d=\"M2394 3279 l-29 -30 -3 -207 c-2 -182 0 -211 15 -242 39 -76 157 -76 196 0 15 31 17 60 15 243 l-3 209 -33 29 c-26 23 -41 29 -80 29 -41 0 -53 -5 -78 -31z\"\/><path d=\"M3085 3251 c-45 -19 -58 -50 -96 -229 -47 -217 -49 -260 -13 -295 52 -53 146 -42 177 20 16 31 87 366 87 410 0 70 -86 122 -155 94z\"\/><path d=\"M1751 3234 c-13 -9 -29 -31 -37 -50 -12 -29 -10 -49 21 -204 19 -94 39 -189 45 -210 14 -50 54 -80 110 -80 34 0 48 6 76 34 21 21 34 44 34 59 0 14 -18 113 -40 219 -37 178 -43 195 -70 221 -36 32 -101 37 -139 11z\"\/><path d=\"M1163 3073 c-36 -7 -73 -59 -73 -102 0 -56 133 -378 171 -413 34 -32 83 -37 129 -13 70 36 67 87 -16 290 -86 209 -89 214 -129 231 -35 14 -42 15 -82 7z\"\/><path d=\"M3689 3066 c-15 -9 -33 -30 -42 -48 -48 -103 -147 -355 -147 -375 0 -98 131 -148 192 -74 13 15 57 108 97 206 80 196 84 226 37 273 -30 30 -99 39 -137 18z\"\/><path d=\"M583 2784 c-38 -19 -67 -74 -58 -113 9 -42 211 -354 242 -373 16 -10 45 -18 66 -18 51 0 107 52 107 100 0 39 -1 41 -124 234 -80 126 -108 162 -133 173 -41 17 -61 16 -100 -3z\"\/><path d=\"M4250 2784 c-14 -9 -74 -91 -133 -183 -95 -150 -107 -173 -107 -213 0 -55 33 -94 87 -104 67 -13 90 8 211 198 130 202 137 225 78 284 -27 27 -42 34 -72 34 -22 0 -50 -8 -64 -16z\"\/><path d=\"M2275 2693 c-553 -48 -1095 -270 -1585 -649 -135 -104 -459 -423 -483 -476 -23 -49 -22 -139 2 -186 73 -142 361 -457 571 -626 285 -228 642 -407 990 -497 242 -63 336 -73 660 -74 310 0 370 5 595 52 535 111 1045 392 1455 803 122 121 250 273 275 326 19 41 19 137 0 174 -41 79 -309 363 -465 492 -447 370 -946 591 -1479 653 -113 14 -422 18 -536 8z m395 -428 c171 -34 330 -124 456 -258 112 -119 167 -219 211 -378 27 -96 24 -300 -5 -401 -72 -255 -236 -447 -474 -557 -132 -62 -201 -76 -368 -76 -167 0 -236 14 -368 76 -213 98 -373 271 -451 485 -162 444 86 934 547 1084 153 49 292 57 452 25z m909 -232 c222 -123 408 -262 593 -441 76 -74 138 -139 138 -144 0 -16 -233 -242 -330 -319 -155 -123 -309 -223 -461 -299 l-81 -41 32 46 c18 26 49 83 70 128 143 306 141 649 -6 957 -25 52 -61 116 -79 142 l-34 47 45 -20 c26 -10 76 -36 113 -56z m-2057 25 c-40 -58 -105 -190 -130 -263 -110 -324 -59 -707 132 -981 25 -35 42 -64 37 -64 -19 0 -241 119 -326 174 -188 122 -406 314 -532 468 l-58 71 108 103 c185 178 428 349 672 473 66 33 121 60 123 61 2 0 -10 -19 -26 -42z\"\/><path d=\"M2375 1950 c-198 -44 -350 -190 -395 -379 -18 -76 -8 -221 19 -290 114 -284 457 -406 731 -260 98 52 188 154 231 260 27 69 37 214 19 290 -38 163 -166 304 -326 360 -67 23 -215 33 -279 19z\"\/><\/g><\/svg><\/i> <img loading=\"lazy\" decoding=\"async\" width=\"16\" height=\"16\" alt=\"Loading\" src=\"https:\/\/www.ixpower.cn\/wp-content\/plugins\/page-views-count\/ajax-loader-2x.gif\" border=0 \/><\/p>\n<div class=\"pvc_clear\"><\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u5fae\u7535\u5b50\u5236\u9020\u548c\u7ec4\u4ef6\u7ec4\u88c5\u662f\u4efb\u4f55\u5c04\u9891\u4ea7\u54c1\u751f\u4ea7\u94fe\u7684\u5173\u952e\u6b65\u9aa4\uff0c\u56e0\u4e3a\u5b83\u51b3\u5b9a\u4e86\u4ea7\u54c1\u7684\u4e0a\u5e02\u65f6\u95f4\u4ee5\u53ca\u53ef\u4ee5\u5728\u6709\u9650\u7684\u4ea7\u54c1\u5f00\u53d1\u65f6\u95f4\u5185\u8fdb [&hellip;]<\/p>\n<div class=\"pvc_clear\"><\/div>\n<p id=\"pvc_stats_30841\" class=\"pvc_stats total_only  \" data-element-id=\"30841\" style=\"\"><i class=\"pvc-stats-icon medium\" aria-hidden=\"true\"><svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" version=\"1.0\" viewBox=\"0 0 502 315\" preserveAspectRatio=\"xMidYMid meet\"><g transform=\"translate(0,332) scale(0.1,-0.1)\" fill=\"\" stroke=\"none\"><path d=\"M2394 3279 l-29 -30 -3 -207 c-2 -182 0 -211 15 -242 39 -76 157 -76 196 0 15 31 17 60 15 243 l-3 209 -33 29 c-26 23 -41 29 -80 29 -41 0 -53 -5 -78 -31z\"\/><path d=\"M3085 3251 c-45 -19 -58 -50 -96 -229 -47 -217 -49 -260 -13 -295 52 -53 146 -42 177 20 16 31 87 366 87 410 0 70 -86 122 -155 94z\"\/><path d=\"M1751 3234 c-13 -9 -29 -31 -37 -50 -12 -29 -10 -49 21 -204 19 -94 39 -189 45 -210 14 -50 54 -80 110 -80 34 0 48 6 76 34 21 21 34 44 34 59 0 14 -18 113 -40 219 -37 178 -43 195 -70 221 -36 32 -101 37 -139 11z\"\/><path d=\"M1163 3073 c-36 -7 -73 -59 -73 -102 0 -56 133 -378 171 -413 34 -32 83 -37 129 -13 70 36 67 87 -16 290 -86 209 -89 214 -129 231 -35 14 -42 15 -82 7z\"\/><path d=\"M3689 3066 c-15 -9 -33 -30 -42 -48 -48 -103 -147 -355 -147 -375 0 -98 131 -148 192 -74 13 15 57 108 97 206 80 196 84 226 37 273 -30 30 -99 39 -137 18z\"\/><path d=\"M583 2784 c-38 -19 -67 -74 -58 -113 9 -42 211 -354 242 -373 16 -10 45 -18 66 -18 51 0 107 52 107 100 0 39 -1 41 -124 234 -80 126 -108 162 -133 173 -41 17 -61 16 -100 -3z\"\/><path d=\"M4250 2784 c-14 -9 -74 -91 -133 -183 -95 -150 -107 -173 -107 -213 0 -55 33 -94 87 -104 67 -13 90 8 211 198 130 202 137 225 78 284 -27 27 -42 34 -72 34 -22 0 -50 -8 -64 -16z\"\/><path d=\"M2275 2693 c-553 -48 -1095 -270 -1585 -649 -135 -104 -459 -423 -483 -476 -23 -49 -22 -139 2 -186 73 -142 361 -457 571 -626 285 -228 642 -407 990 -497 242 -63 336 -73 660 -74 310 0 370 5 595 52 535 111 1045 392 1455 803 122 121 250 273 275 326 19 41 19 137 0 174 -41 79 -309 363 -465 492 -447 370 -946 591 -1479 653 -113 14 -422 18 -536 8z m395 -428 c171 -34 330 -124 456 -258 112 -119 167 -219 211 -378 27 -96 24 -300 -5 -401 -72 -255 -236 -447 -474 -557 -132 -62 -201 -76 -368 -76 -167 0 -236 14 -368 76 -213 98 -373 271 -451 485 -162 444 86 934 547 1084 153 49 292 57 452 25z m909 -232 c222 -123 408 -262 593 -441 76 -74 138 -139 138 -144 0 -16 -233 -242 -330 -319 -155 -123 -309 -223 -461 -299 l-81 -41 32 46 c18 26 49 83 70 128 143 306 141 649 -6 957 -25 52 -61 116 -79 142 l-34 47 45 -20 c26 -10 76 -36 113 -56z m-2057 25 c-40 -58 -105 -190 -130 -263 -110 -324 -59 -707 132 -981 25 -35 42 -64 37 -64 -19 0 -241 119 -326 174 -188 122 -406 314 -532 468 l-58 71 108 103 c185 178 428 349 672 473 66 33 121 60 123 61 2 0 -10 -19 -26 -42z\"\/><path d=\"M2375 1950 c-198 -44 -350 -190 -395 -379 -18 -76 -8 -221 19 -290 114 -284 457 -406 731 -260 98 52 188 154 231 260 27 69 37 214 19 290 -38 163 -166 304 -326 360 -67 23 -215 33 -279 19z\"\/><\/g><\/svg><\/i> <img loading=\"lazy\" decoding=\"async\" width=\"16\" height=\"16\" alt=\"Loading\" src=\"https:\/\/www.ixpower.cn\/wp-content\/plugins\/page-views-count\/ajax-loader-2x.gif\" border=0 \/><\/p>\n<div class=\"pvc_clear\"><\/div>\n","protected":false},"author":56,"featured_media":30842,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"publish_to_discourse":"0","publish_post_category":"8","wpdc_auto_publish_overridden":"","wpdc_topic_tags":"","wpdc_pin_topic":"","wpdc_pin_until":"","discourse_post_id":"","discourse_permalink":"","wpdc_publishing_response":"","wpdc_publishing_error":"","footnotes":""},"categories":[219,2324],"tags":[2350],"class_list":["post-30841","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-219","category-2324","tag-2350"],"_links":{"self":[{"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/posts\/30841","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/users\/56"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/comments?post=30841"}],"version-history":[{"count":1,"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/posts\/30841\/revisions"}],"predecessor-version":[{"id":30844,"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/posts\/30841\/revisions\/30844"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/media\/30842"}],"wp:attachment":[{"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/media?parent=30841"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/categories?post=30841"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ixpower.cn\/index.php\/wp-json\/wp\/v2\/tags?post=30841"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}